K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Laser-probed mass spectral analysis of fluorocarbon deposits formed by CF4/H2, C4F8, and C4F8/H2 plasmas,
International Workshop on Basic Aspects of Non-equilibrium Plasmas Interacting with Surfaces (January, 2000, Nagasaki, Japan)
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Production of Carbon Clusters by Laser Ablation of Graphite and Polymers in Vacuum,
The Seventh European Conference on Atomic and Molecular Physics (April, 2001, Berlin, Germany)
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Formation of Carbon Clusters by Laser Ablation of Polymers in Vacuum,
25th International Conference on Phenomena in Ionized Gases (July, 2001, Nagoya, Japan)
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Observation of Large-Size Carbon Cluster Ions by Laser Ablation of Polymers in vacuum,
COLA'01 The 6th International Conference on Laser Ablation (October, 2001, Tsukuba, Japan)
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Laser Desorption Time-of-Flight Mass Spectrometry of Deposits Synthesized by Fluorocarbon Plasmas,
Frontiers of Surface Engineering 2001 Conference and Exhibition (October, 2001, Nagoya, Japan)
K. Shibagaki, T. Maeda, N. Takada, K. Sasaki, and K. Kadota,
Laser desorption time-of-flight mass spectrometry of fluorocarbon films synthesized by C4F8/H2 plasmas,
16th ESCAMPIG and 5th ICRP Joint Conference (July, 2002, Grenoble, France)
K. Shibagaki, T. Maeda, N. Takada, K. Sasaki, and K. Kadota,
Laser-desorption time-of-flight mass spectrometry for analyzing fluorocarbon films synthesized by C4F8/H2 plasmas,
The Third Asian Pacific Laser Symposium (September, 2002, Osaka, Japan)
K. Shibagaki
The power of visualized plasma diagnostics: Laser-induced fluorescence imaging spectroscopy in magnetron sputtering plasmas,
COE Workshop on Application of Advanced Laser Techniques to Plasma Diagnostics (September, 2003, Nagoya, Japan)
Y. Kamiya, K. Shibagaki, and K. Sasaki
Enhancement of the synthesis efficiency of carbon cluster ions by the irradiation of two laser pulses to polymers in vacuum,
The 7th International Conference on Laser Ablation (October, 2003, Hersonissos, Crete, Greece)
K. Shibagaki, N. Nafarizal, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima, and H. Sugai
Distribution of Fe atom density in a dc magnetron sputtering plasma source measured by laser-induced fluorescence imaging spectroscopy,
56th Gaseous Electronics Conference (October, 2003, San Francisco, USA)
H. Matsui, H. Toyoda, K. Shibagaki, K. Sasaki, T. Kato, S. Iwata, S. Tsunashima, and H. Sugai
Energy distribution measurement of atoms and ions sputtered by a magnetron plasma,
56th Gaseous Electronics Conference (October, 2003, San Francisco, USA)
K. Sasaki, K. Shibagaki, and Y. Kamiya
Production of Carbon Clusters by Laser Ablation in Vacuum,
International Workshop on Plasma Nano-Technology and Its Future Vision (February, 2004, Takayama, Japan)
K. Shibagaki, N. Nafarizal, K. Sasaki, H. Toyoda, T. Kato, S. Iwata, S. Tsunashima, and H. Sugai
Visualization of Density and Velocity Distributions of Atoms in DC Magnetron Sputtering Plasmas by Laser-Induced Fluorescence Imaging Spectroscopy,
International COE Forum on Plamsa Science and Technology (April, 2004, Nagoya, Japan)
H. Toyoda, H. Matsui, K. Shibagaki, K. Sasaki, T. Kato, S. Iwata, S. Tsunashima, and H. Sugai
Mass Spectrometric Measurement of Energetic Ions and Neutrals in Magnetron Plasma for Magnetic Film Deposition,
International COE Forum on Plamsa Science and Technology (April, 2004, Nagoya, Japan)
N. Nafarizal, K. Shibagaki, N. Takada, K. Sasaki, K. Nakamura, and T. Yoshida
Density Distributions of Titanium Atoms and Titanium Ions Measured by Laser-Induced Fluorescence in Magnetron Plasmas,
International COE Forum on Plamsa Science and Technology (April, 2004, Nagoya, Japan)
N. Nafarizal, K. Shibagaki, N. Takada, K. Nakamura, M. Kobayashi, and K. Sasaki
VISUALIZATION OF METAL SPUTTERING PLASMAS BY LASER-INDUCED FLUORESCENCE IMAGING SPECTROSCOPY,
The 7th Asia Pacific Conference on Plasma Science and Technology and the 17th Symposium on Plasma Science for Materials (June, 2004, Fukuoka, Japan)
K. Shibagaki, N. Nafarizal, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima, and H. Sugai
Visualization of spatial velocity distribution of atoms in magnetron sputtering plasmas by laser-induced fluorescence imaging spectroscopy,
The 7th Asia Pacific Conference on Plasma Science and Technology and the 17th Symposium on Plasma Science for Materials (June, 2004, Fukuoka, Japan)
J. Gao, N. Nafarizal, K. Shibagaki, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima, and H. Sugai
Visualized measurements of densities and velocities of Fe and Cu atoms in magnetron sputtering plasmas,
The 57th Gaseous Electronics Conference (September, 2004, Bunratty, Ireland)
N. Nafarizal, K. Shibagaki, N. Takada, K. Nakamura, M. Kobayashi, and K. Sasaki
Ionization Processes of Metal Atoms in High-Pressure dc Magnetron Sputtering Plasmas,
American Vacuum Society 51st International Symposium and Exhibition, (November, 2004, Anaheim, CA)
K. Sasaki, K. Shibagaki, N. Nafarizal, H. Toyoda, T. Kato, S. Iwata, S. Tsunashima, and H. Sugai
2D-Imaging Measurements of Sputtered Atom Velocities in dc Magnetron Discharge by Doppler-Shifted LIF,
American Vacuum Society 51st International Symposium and Exhibition, (November, 2004, Anaheim, CA)
J. Gao, N. Nafarizal, K. Shibagaki, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima, and H. Sugai
Two dimensional measurement of the uniformity of sputtered Cu atom density in magnetron sputtering plasmas,
International Symposium on Sputtering and Plasma Processing, (June, 2005, Kanazawa, Japan)
K. Shibagaki, and K. Sasaki
Measurement of Electron Density and Temperature in Recombining Hydrogen Plasmas by Optical Emission Spectroscopy,
6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing(ICRP-6/SPP-23), (January, 2006, Matsushima, Japan)
K. Sasaki, N. Nafarizal, J.-S. Gao, and K. Shibagaki
Are sputtering products from metal targets really monoatomic?,
The 9th International Symposium on Sputtering & Plasma Processes, (June, 2007, Kanazawa, Japan)
K. Shibagaki, T. Hirasawa, and K. Sasaki
Measurement of negative hydrogen ion densities in high-density recombining hydrogen plasmas,
18th International Symposium on Plasma Chemistry, (August, 2007, Kyoto, Japan)
K. Shibagaki, and K. Sasaki
Mass spectroscopic analysis of carbon cluster ions synthesized by laser ablation in vacuum,
Workshop on Basic Aspects of Nanocluster Formation by Laser Ablation Processes, (March, 2008, Nagoya, Japan)
K. Sasaki, R. Asakawa, K. Shibagaki, and D. Hayashi
Optical emission spectrum from molecular hydrogen in a high-density recombining hydrogen plasma,
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, (July, 2008, Granada, Spain)
K. Shibagaki, R. Asakawa, and K. Sasaki
Diagnostics of high-density, low-temperature recombining hydrogen plasmas produced by helicon-wave discharge,
International Congress on Plasma Physics 2008, (September, 2008, Fukuoka, Japan)
K. Shibagaki, M. Ishida, and M. Ibayashi
Surface Modification of Titanium by Impulse Discharge Plasma Irradiation,
2nd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, (March, 2010, Nagoya, Japan)
K. Shibagaki, M. Ibayashi, A. Mori, T. Hattori, and M. Ishida
Surface Modification of Metals by HV Impulse Discharge in Air and Liquid,
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, (October, 2010, Paris, France)
K. Shibagaki, K. Kawano, and A. Mori
Synthesis and characterization of Ti-Ni shape memory alloy thin films by pulsed laser deposition,
The 11th Conference on Laser Ablation, (November, 2011, Mexico)
K. Shibagaki, and T. Igashira
Fundamental properties of ablated particles in PLD process of FeSi2 thin films,
International Conference on Engineering and Technology, (October, 2016, Toyama, Japan)
S. Tsuchiya, and K. Shibagaki
Temporal evolution of sound waves produced by pulsed laser ablation on metals at atmospheric pressure,
The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases and the 10th International Conference on Reactive Plasmas, (July, 2019, Hokkaido, Japan)
学術論文
K. Shibagaki, T. Kawashima, K. Sasaki, and K. Kadota,
Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum,
Jpn. J. Appl. Phys. Vol. 39 (2000) pp.4959-4963
K. Shibagaki, K. Sasaki, N. Takada, and K. Kadota,
Synthesis of Heavy Carbon Clusters by Laser Ablation in Vacuum,
Jpn. J. Appl. Phys. (Express Letter) Vol. 40 (2001) pp.L851-L853
N. Takada, K. Shibagaki, K. Sasaki, K. Kadota, and K.-I. Oyama
Analysis of the molecular structure of fluorocarbon deposits produced by C4F8 and C4F8-H2 plasmas,
J. Vac. Sci. Technol. A Vol. 19 (2001) pp.689-692
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Production of Carbon Clusters by Laser Ablation of Polymers in Vacuum,
J. Appl. Phys. Vol. 91 (2002) pp.2449-2454
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Synthesis efficiency of heavy carbon clusters from ETFE ablated by different numbers of laser pulse in vacuum,
Appl. Surf. Sci. Vol. 197-198 (2002) pp.598-602
K. Shibagaki, N. Takada, K. Sasaki, and K. Kadota,
Synthetic characteristics of large carbon cluster ions by laser ablation of polymers in vacuum,
J. Appl. Phys. Vol. 93 (2003) pp.655-661
K. Shibagaki, T. Maeda, N. Takada, K. Sasaki, and K. Kadota,
Laser desorption time-of-flight mass spectrometry of fluorocarbon films synthesized by C4F8/H2 plasmas,
J. Vac. Sci. Technol. A Vol. 21 (2003) pp.866-873
N. Takada, K. Sasaki, T. Iida, K. Shibagaki, and K. Kadota,
Estimation of carbon fluxes interchanging between chamber wall and gas phase in fluorocarbon plasmas,
Jpn. J. Appl. Phys. Vol. 42 (2003) pp.4510-4512
N. Takada, T. Iida, K. Shibagaki, and K. Sasaki,
Chemical bonds of fluorocarbon films which can be a source of CFx radicals,
J. Vac. Sci. Technol. A Vol. 22 (2004) pp.413-418
K. Shibagaki, Y. Kamiya, and K. Sasaki,
Enhancement of the synthesis efficiency of carbon cluster ions by the irradiation of two laser pulses to polymers in vacuum,
Applied Physics A. Vol. 79 (2004) pp.1161-1163
K. Shibagaki, N. Nafarizal, and K. Sasaki,
Spatial distribution of the velocity distribution function of Fe atoms in a magnetron sputtering plasma source,
J. Appl. Phys. Vol. 98 (2005) pp.043310 1-6
N. Nafarizal, N. Takada, K. Shibagaki, K. Nakamura, T. Sago, and K. Sasaki,
Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges,
Jpn. J. Appl. Phys. Vol. 44, No. 23 (2005) pp.L737-L739
K. Shibagaki, and K. Sasaki,
Negative ion densities in high-density, low-temperature recombining hydrogen plasmas,
J. Phys. D: Appl. Phys., Vol. 41 (2008) 195204 (7pp)
K. Shibagaki, R. Asakawa, D. Hayashi, and K. Sasaki,
Dramatic Enhancement of OH(A2Σ+) Density in a Recombining Hydrogen Plasma,
Plasma and Fusion Research, Vol. 3 (2008) 055
K. Shibagaki, K. Kawano, and A. Mori,
Synthesis and characterization of Ti-Ni shape memory alloy thin films by pulsed laser deposition,
Applied Physics A., Vol. 110, Issue 4 (2013) pp.805-808